(论文) 摘 要随着激光技术的发展以及全球各国对核聚变研发的需求,激光系统中脉冲激光需要向更高功率更高能量方向发展,光学薄膜成为限制这一发展的主要因素。改进光学薄膜的性能,提高其抗激光的强度具有重要的科学意义。对于物理膜,溶胶-凝胶化学薄膜从各方面都显示出其优势。本文从化学膜的研究现状、相关物理化学、制备、表征技术以及激光损伤阈值方面调研了解化学膜的相关知识,重点研究了化学膜损伤阈值的损伤机理、影响损伤阈值的因素以及化学膜损伤的判定和损伤阈值的确定方法。设计实验采用椭偏仪和透射式光热透镜技术等方法探究了化学膜和物理膜的折射率、孔隙率、热吸收系数激光损伤阈值以及损伤形貌的区别,接着根据相关理论设想实验结果并进行分析,最后介绍一些国内化学膜与国外化学膜的差距。- I -关键词: 光学薄膜,溶胶-凝胶,损伤阈值(论文)Survey and relevant experiments’ designing scheme of chemical filmAbstractWith the development of laser technology and the worldwide demand for nuclear fusion research and development, the pulsed laser in the laser system needs to develop to a higher power and higher energy, and optical film has become the main factor to limit this development. It is of great scientific significance to improve the properties of optical thin films and enhance their anti-laser strength.For physical films, sol-gel chemical films show their advantages in many of aspects. In this paper, chemical films were investigated in terms of the research status, related physics and chemistry, preparation, characterization technology and laser-induced damage threshold, especially in laser-induced damage threshold of damage mechanism, the influencing factors of damage threshold, the way to judge a chemical film has been damaged and methods to determining the threshold’ value. Design experiments using ellipsometer and transmissive optical thermal lens to explore the refractive index, porous ratio, thermal absorption, laser-induced damage thr...