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Photomask Making Roger Robbins 3/6/2007 The University of Texas at Dallas Erik Jonsson School of Engineering Title: Photomask Making Page 1 of 24 Author: Roger Robbins 3/6/2007 Document Number: SP-07-001 The University of Texas at DallasPhotomask Making Roger Robbins 3/6/2007 Table of Contents Photomask Making..........................................................................................................2 Table of Contents ........................................................................................................2 Photomask Making..........................................................................................................3 Purpose.......................................................................................................................3 Introduction..................................................................................................................3 Mask “Color ”................................................................................................................3 Process Description.....................................................................................................4 Step 1: Plasma Cleaning..........................................................................................4 Step 2: HMDS Application........................................................................................5 Step 3: Resist Application ........................................................................................6 Step 4: Pre-Bake......................................................................................................8 Step 5: Lithographic Patterning ................................................................................8 Step 6: Post Bake ..................................................................................................10 Step 7: Develop..........................